Uburyo bwo gutegura polysilicon.

1. Kuremera

Shira quartz isize ingirakamaro kumeza yo guhanahana ubushyuhe, ongeramo ibikoresho bibisi bya silicon, hanyuma ushyire ibikoresho byo gushyushya, ibikoresho byo kubika no gutwikira itanura, wimure itanura kugirango ugabanye umuvuduko mw itanura kugeza 0.05-0.1mbar kandi ukomeze icyuho. Menyekanisha argon nka gaze ikingira kugirango ugumane igitutu mu itanura hafi ya 400-600mbar.

2. Gushyushya

Koresha igishushanyo cya grafite kugirango ushushe umubiri witanura, banza uhumure ubuhehere bwamamajwe hejuru yibice bya grafite, igikoresho cyo kubika, ibikoresho bya silikoni, nibindi, hanyuma ushushe buhoro kugirango ubushyuhe bwa quartz bugere bugere kuri 1200-1300℃. Iyi nzira ifata 4-5h.

3. Gushonga

Menyekanisha argon nka gaze ikingira kugirango ugumane igitutu mu itanura hafi ya 400-600mbar. Buhoro buhoro wongere imbaraga zo gushyushya kugirango uhuze ubushyuhe mubikomeye bigera ku 1500℃, hamwe nibikoresho bya silicon bitangira gushonga. Gumana hafi 1500℃mugihe cyo gushonga kugeza gushonga birangiye. Iyi nzira ifata amasaha agera kuri 20-22.

4. Gukura kwa kirisiti

Ibikoresho bya silikoni bimaze gushonga, ingufu zo gushyushya ziragabanuka kugirango ubushyuhe bwikigabanuka bugere kuri 1420-1440℃, akaba aribwo gushonga kwa silicon. Noneho quartz iboneka buhoro buhoro ijya hepfo, cyangwa igikoresho cyo kubika izamuka gahoro gahoro, kuburyo quartz yabambwe iva buhoro buhoro ikava ahantu hashyuha kandi igahana ubushyuhe hamwe nibidukikije; icyarimwe, amazi anyuzwa mu isahani yo gukonjesha kugirango agabanye ubushyuhe bwashonga kuva hasi, hanyuma silikoni ya kristaline ikorwa bwa mbere hepfo. Mugihe cyo gukura, intera ikomeye-isukuye burigihe iguma ibangikanye nindege itambitse kugeza gukura kwa kirisiti kurangiye. Iyi nzira ifata amasaha agera kuri 20-22.

5. Annealing

Nyuma yo gukura kwa kirisiti irangiye, bitewe nubushyuhe bukabije buri hagati yo hepfo no hejuru ya kristu, guhangayikishwa nubushyuhe birashobora kubaho muri ingot, byoroshye kongera kumeneka mugihe cyo gushyushya wafer wa silicon no gutegura bateri . Kubwibyo, nyuma yo gukura kwa kirisiti irangiye, ingunguru ya silicon ibikwa hafi yo gushonga mumasaha 2-4 kugirango ubushyuhe bwa silicon ingot bube kandi bigabanye ubushyuhe bwumuriro.

6. Gukonja

Nyuma ya silicon ingot yometse mumatanura, kuzimya ingufu zishyushya, kuzamura igikoresho cyogukoresha ubushyuhe cyangwa kumanura burundu ingoteri ya silicon, hanyuma winjize gazi nini ya gaze ya argon mumatanura kugirango ugabanye buhoro buhoro ubushyuhe bwa silicon ingot hafi. ubushyuhe bw'icyumba; icyarimwe, umuvuduko wa gaze mu itanura uzamuka buhoro buhoro kugeza ugeze ku muvuduko w'ikirere. Iyi nzira ifata amasaha agera kuri 10.